DocumentCode
1778607
Title
Calculation and experimental analysis of micromirror rotation angle
Author
Timoshenkov, S. ; Evstafyev, S. ; Britkov, I. ; Artemov, E.
Author_Institution
Microelectron. Dept., Nat. Res. Univ. of Electron. Technol., Moscow, Russia
fYear
2014
fDate
15-18 April 2014
Firstpage
131
Lastpage
134
Abstract
Research and development results of micromirror matrix based on thermomechanical actuators have been shown. Methodology for calculating the thermomechanical deformation of the actuator under heating has been proposed. Also system that helped to define the relation between the angle of rotation of individual elements of the micromirror matrix and temperature overheating have been developed and described.
Keywords
actuators; angular measurement; deformation; micro-optomechanical devices; micromirrors; micromirror matrix; micromirror rotation angle; temperature overheating; thermomechanical actuators; thermomechanical deformation; Actuators; Force; Heating; Micromirrors; Structural beams; Temperature measurement; MOEMS; micromirror matrix; thermomechanical actuator;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics and Nanotechnology (ELNANO), 2014 IEEE 34th International Conference on
Conference_Location
Kyiv
Print_ISBN
978-1-4799-4581-8
Type
conf
DOI
10.1109/ELNANO.2014.6873953
Filename
6873953
Link To Document