Nano Displacement Sensor´s Signal Acquisition and Processing System for Piezoelectric Ceramic Transducer Actuator

With the development of modern science and technology, many high technology fields have entered the nano-world, such as processing and manufacturing of aerospace products, precision measurement devices, and high density integrated circuits and so on. Close to the nanometer scale with the characteristic size of atoms and molecules, the general conventional techniques are no longer applicable, and therefore many countries focused their eyes on the study of nanotechnology, especially in nano-operation and measurement techniques. Piezoelectric ceramic actuator driver for its excellent performance is widely used in micro/nano positioning operation fields. However, due to the existence of its own hysteresis, creep and nonlinear shortcomings seriously affect the accuracy of the nano-scale position. To solve the above problem, we designed a displacement sensor to measure the real-time displacement of piezoelectric ceramic actuator and use the close-loop control which based on the feedback of displacement to improve the positioning accuracy of piezoelectric ceramic actuator driver. After the improvement, the nano-displacement sensor´s accuracy has reached the nanometer level. Experimental results show that the resarch in this paper can really improve the performance of the nanodisplacement sensor.