Title :
Interlayer grating coupler for Si/SiO2/SiN platform
Author :
Sodagar, Majid ; Pourabolghasem, Reza ; Eftekhar, Ali Asghar ; Alibi, Ali
Author_Institution :
Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We design a low insertion loss (1.9 dB) and wideband (3-dB bandwidth of 50 nm) interlayer grating coupler for the Si/SiO2/SiN platform. Measured performance of the fabricated device agrees well with the theoretically predicted results.
Keywords :
diffraction gratings; elemental semiconductors; integrated optics; optical couplers; optical losses; silicon; silicon compounds; Si-SiO2-SiN; Si/SiO2/SiN platform; design; interlayer grating coupler; low insertion loss; performance; wideband interlayer grating coupler; Couplers; Couplings; Gratings; Optical waveguides; Silicon; Silicon compounds;
Conference_Titel :
Photonics Conference (IPC), 2014 IEEE
Conference_Location :
San Diego, CA
DOI :
10.1109/IPCon.2014.6995264