DocumentCode
1779370
Title
In-situ measurement of wafer camber by a laser-feedback detector
Author
Tambosso, Tiziana ; Donati, Silvano ; Ray-Hua Horng
Author_Institution
Dept. of Electron. Dacun, Da Yeh Univ., Changhua, Taiwan
fYear
2014
fDate
12-16 Oct. 2014
Firstpage
360
Lastpage
361
Abstract
Using a laser diode as an echo detector of the optical reflection from a wafer surface, we demonstrate a very compact and extremely simple optical probe capable of measuring the curvature radius of a wafer, inside an MOCVD chamber, on the range from a few meters to about 10 km.
Keywords
MOCVD; echo; laser feedback; measurement by laser beam; reflectivity; semiconductor lasers; MOCVD chamber; curvature radius; echo detector; in-situ measurement; laser diode; laser-feedback detector; optical reflection; wafer camber; wafer surface; Detectors; Laser beams; Measurement by laser beam; Optical interferometry; Optical variables measurement; Substrates; Surface emitting lasers; curvature measurement; proflometry; self-mixing interferometry; wafer characterization;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics Conference (IPC), 2014 IEEE
Conference_Location
San Diego, CA
Type
conf
DOI
10.1109/IPCon.2014.6995397
Filename
6995397
Link To Document