Vickers microhardness of oxidized and nonoxidized porous silicon

Author

Rahmoun, K. ; Iost, A. ; Keryvin, V. ; Guillemot, G. ; Sangleboeuf, J.C. ; Guendouz, M. ; Haji, L.

Author_Institution

Unite de Rech. Mater. et Energies Renouvelables URMER, Univ. of Tlemcen, Tlemcen, Algeria

fYear

2014

fDate

26-27 Oct. 2014

Firstpage

1

Lastpage

6

Abstract

In this work we present our recent investigation on characterizing mechanical properties of porous silicon (PS) by using instrumented micro-indentation. Hardness and elastic modulus for oxidized and nonoxidized PS were measured. Experimental results revealed that hardness and elastic modulus are significantly lower than that of silicon substrate and decrease with increasing porosities. After oxidation an increase of the hardness and elastic modulus were observed. The task of stabilization of PS mechanical parameters can be solved with the help of oxidation.

Keywords

Vickers hardness; elastic moduli; elemental semiconductors; indentation; microhardness; oxidation; porosity; porous semiconductors; silicon; Si; Vickers microhardness; elastic modulus; instrumented microindentation; mechanical parameter; mechanical properties; nonoxidized porous silicon; oxidation; oxidized porous silicon; porosity; silicon substrate; Films; Mechanical factors; Oxidation; Scanning electron microscopy; Silicon; Substrates; Elastic modulus; Microhardness; Oxidation; Porous silicon; Vickers indentation;

fLanguage

English

Publisher

ieee

Conference_Titel

Dielectric Materials for Photovoltaic Systems (NAWDMPV), 2014 North African Workshop on

Conference_Location

Tlemcen

Print_ISBN

978-1-4799-6502-1

Type

conf

DOI

10.1109/NAWDMPV.2014.6997620

Filename

6997620