Title :
Leds with polydimethylsiloxane 2D PhC membrane in the surface
Author :
Pudis, D. ; Suslik, L. ; Nolte, R. ; Schaaf, P. ; Kovac, J. ; Gaso, P.
Author_Institution :
Dept. of Phys., Univ. of Zilina, Zilina, Slovakia
Abstract :
In this paper we present effective imprinting technique for fabrication of photonic crystal (PhC) structures on surface of thin polydimethylsiloxane (PDMS) membranes. We prepared two-dimensional (2D) PhC surface relief structures of period 650 nm in thin PDMS membranes with depth up to 140 nm. The patterned PDMS membranes were placed on LED chip. The diffraction effect of PhC PDMS membranes with 2D square and triangular symmetry was then analyzed by measurements of far-field radiation pattern.
Keywords :
light diffraction; light emitting diodes; membranes; optical polymers; photonic crystals; LED chip; diffraction effect; far-field radiation pattern; imprinting technique; size 650 nm; surface relief structures; thin polydimethylsiloxane membranes; triangular symmetry; two-dimensional photonic crystal structures; Antenna radiation patterns; Light emitting diodes; Lithography; Optical device fabrication; Optical surface waves; Resists;
Conference_Titel :
Advanced Semiconductor Devices & Microsystems (ASDAM), 2014 10th International Conference on
Conference_Location :
Smolenice
Print_ISBN :
978-1-4799-5474-2
DOI :
10.1109/ASDAM.2014.6998709
