A MEMS design methodology for model-order-reduction, based on high-order parametric elements

Author

Sanginario, Alessandro ; Schropfer, Gerold ; Zerbini, Sarah ; Ekwinska, Magdalena ; Houlihan, Ruth ; Demarchi, Danilo

Author_Institution

Ist. Italiano di Tecnol., Turin, Italy

fYear

2014

fDate

20-22 Oct. 2014

Firstpage

1

Lastpage

4

Abstract

The design of a heterogeneous smart system is a major and multidisciplinary challenge. The next generation smart systems will include analog, digital and MEMS components described using different languages relying on parametric models at different abstraction level. The SMArt system Co-design (SMAC) FP7 ICT project aim is the overcome all the issues related to the mixed design of a smart system. Inside this project a step toward design tool integration has been made with the presented work. As a matter of fact, we present a case study for the definition of a complete flow for the design and use of MEMS devices inside standard microelectronics design tools.

Keywords

integrated circuit design; micromechanical devices; reduced order systems; MEMS components; MEMS devices; SMAC FP7 ICT project; design tool integration; heterogeneous smart system; high-order parametric elements; model-order-reduction; next generation smart systems; parametric models; smart system codesign FP7 ICT project; standard microelectronics design tools; Accelerometers; Integrated circuit modeling; Mathematical model; Micromechanical devices; Microphones; Noise; Sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Devices & Microsystems (ASDAM), 2014 10th International Conference on

Conference_Location

Smolenice

Print_ISBN

978-1-4799-5474-2

Type

conf

DOI

10.1109/ASDAM.2014.6998712

Filename

6998712