Title :
Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes
Author :
Bazaei, Ali ; Mohammadi, Arash ; Reza Moheimani, S.O.
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Newcastle, NSW, Australia
Abstract :
This paper addresses effects of constant voltage and current biasing methods on sensing bandwidth of electrothermal displacement sensors in micro-electromechanical systems (MEMS). The dynamic response of the sensor is modeled based on first principles. The obtained model successfully captures a variety of nonlinear phenomena. Experiments are conducted to confirm the validity of the model and simulation results.
Keywords :
displacement measurement; electric current measurement; microfabrication; microsensors; transducers; voltage measurement; constant current biasing method; constant voltage biasing method; dynamic response; electrothermal MEMS transducer; electrothermal displacement sensor; first principle; microelectromechanical system; microfabrication; nonlinear phenomena; Bandwidth; Mathematical model; Micromechanical devices; Resistance heating; Thermal sensors;
Conference_Titel :
Advanced Intelligent Mechatronics (AIM), 2014 IEEE/ASME International Conference on
Conference_Location :
Besacon
DOI :
10.1109/AIM.2014.6878289
