Micro-ring-resonator wavelength-selective filter using highly-stacked quantum dot intermixed waveguide

Author

Takei, Y. ; Matsumoto, Akiyoshi ; Matsushita, Akira ; Akahane, Kouichi ; Matsushima, Y. ; Utaka, K.

Author_Institution

Fac. of Sci. & Eng., Waseda Univ., Tokyo, Japan

fYear

2014

fDate

11-15 May 2014

Firstpage

1

Lastpage

2

Abstract

We fabricated a double micro-ring-resonator wavelength-selective filter using the waveguide fabricated by the intermixing of InAs/InGaAlAs quantum dots grown on an InP (311)B substrate. Intermixing was done by using ICP-RIE etching and annealing technique at a low temperature of 650°C. The output-power contrasts of the device were 9.0 dB and 8.6 dB for TE and TM modes, respectively.

Keywords

aluminium compounds; annealing; gallium compounds; indium compounds; micro-optics; microcavities; optical fabrication; optical filters; optical resonators; optical waveguides; semiconductor quantum dots; sputter etching; ICP-RIE etching; InAs-InGaAlAs; TE modes; TM modes; annealing; highly-stacked quantum dot intermixed waveguide; inductively coupled plasma-reactive-ion etching; microring-resonator wavelength-selective filter; output-power contrasts; quantum dots; temperature 650 degC; Annealing; Etching; Fabrication; Indium phosphide; Optical filters; Quantum dots; InAs/InGaAlAs; PL wavelength; intermixing; micro-ring-resonator; quantum dots; wavelength-selective-filter;

fLanguage

English

Publisher

ieee

Conference_Titel

Indium Phosphide and Related Materials (IPRM), 26th International Conference on

Conference_Location

Montpellier

Type

conf

DOI

10.1109/ICIPRM.2014.6880523

Filename

6880523