Adaptive control of MEMS-based AC voltage reference source

In this paper, the fundamentals and operation principles of the MEMS AC voltage reference is discussed and its model parameters are introduced. The accuracy of the manufacturing parameters of tunable MEMS capacitor as the main element of the MEMS AC voltage reference is of great significance to obtain a precise output voltage. Although many efforts are made to manufacture the MEMS tunable capacitors with exact desired physical characteristics, the uncertainties unavoidably transpire in fabrication process due to imperfections in micro-machining procedures. An adaptive controller is proposed to make this MEMS voltage reference source give a well-regulated voltage in spite of uncertainties in the device dynamics and finally decrease the malfunctioning effects of fabrication imperfections.