Development and manufacture of electrostatic capacitive energy harvesting device

Author

Knyazev, Ivan V. ; Dorzhiev, Vitalii Yu ; Gluhov, A.V. ; Panova, Anastasiya A.

Author_Institution

Novosibirsk Factory of Semicond. Devices with Special Design Centre, Novosibirsk, Russia

fYear

2014

fDate

June 30 2014-July 4 2014

Firstpage

51

Lastpage

53

Abstract

The design of MEMS electrostatic generator that converts the mechanical energy vibration into electrical energy is developed. The prototype of the generator has been implemented and tested. At vibration frequency of 67 Hz and external load resistance of 23.7 MΩ the output power of 175 W is achieved. The estimation of the maximum power density for one-capacitor and two-capacitor structures of MEMS generator is carried out.

Keywords

electrets; electrostatic generators; energy harvesting; micromechanical devices; MEMS electrostatic generator; electrostatic capacitive energy harvesting device; frequency 67 Hz; mechanical energy vibration; power 175 W; resistance 23.7 Mohm; Electrets; Electrodes; Electrostatics; Estimation; Generators; Micromechanical devices; Vibrations; MEMS; electret; energy harvester;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro/Nanotechnologies and Electron Devices (EDM), 2014 15th International Conference of Young Specialists on

Conference_Location

Novosibirsk

ISSN

2325-4173

Print_ISBN

978-1-4799-4669-3

Type

conf

DOI

10.1109/EDM.2014.6882475

Filename

6882475