Fabrication of ZnO luminescent films for nanometric light source of high-resolution optical microscope

Author

Kanamori, Satoshi ; Fukuta, Masahiro ; Furukawa, Toshihiro ; Inami, Wataru ; Kominami, Hiroko ; Kawata, Yoshimasa ; Nakanishi, Yoichiro

Author_Institution

Grad. Sch. of Eng., Shizuoka Univ., Hamamatsu, Japan

fYear

2014

fDate

2-4 Sept. 2014

Firstpage

3

Lastpage

5

Abstract

We fabricated ZnO thin films for use as a light source of a high resolution optical microscope and characterized the properties of the films. The properties of the fabricated ZnO films were evaluated as the light source of the microscope. The cathodoluminescence intensity of the 100 nm thick ZnO film deposited on a Si₃N₄ film was enhanced significantly by high temperature annealing in N₂. The microscope images of 200 nm diameter gold particles taken using as-deposited and annealed ZnO film indicated that annealed ZnO films can provide a higher signal-to-noise ratio and a higher frame rate than the as deposited ZnO film.

Keywords

II-VI semiconductors; annealing; cathodoluminescence; gold; light sources; nanophotonics; optical microscopes; semiconductor growth; semiconductor thin films; sputter deposition; wide band gap semiconductors; zinc compounds; Au; Si₃N₄; Si₃N₄ film; ZnO; ZnO luminescent films; cathodoluminescence intensity; frame rate; gold particles; high temperature annealing; high-resolution optical microscope; nanometric light source; rf magnetron sputtering; signal-to-noise ratio; size 100 nm to 200 nm; Annealing; Gold; Light sources; Magnetic force microscopy; Microscopy; Optical microscopy; Zinc oxide; Zinc Oxide; annealing; cathodoluminescence; high resolution imaging; rf magnetron sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Photonics (ICP), 2014 IEEE 5th International Conference on

Conference_Location

Kuala Lumpur

Type

conf

DOI

10.1109/ICP.2014.7002293

Filename

7002293