Micromechanical accelerometers based on surface acoustic waves

The fundamentals of the theory of surface acoustic waves (SAW) and the principles of construction of differential SAW-based converters are disclaimed. The concept of constructing a SAW-based microaccelerometer, which allows to provide the stability of the device operation in a wide temperature range, is presented. Calculation of the optimal form of the microaccelerometer console for reducing the effect of technological errors is presented. The technology of quartz packaging, the possibility of laser frequency adjustment of the resonator and simultaneous application of the resonator structures on the opposite sides of the console with the use of a laser beam are considered.