Micro rate gyroscopes based on surface acoustic waves

Author

Lukyanov, D. ; Shevchenko, S. ; Kukaev, A. ; Ivanov, Alexander ; Telichkin, R.

Author_Institution

Dept. of Laser Meas. & Navig. Syst., St.-Petersburg State Electrotech. Univ., St. Petersburg, Russia

fYear

2014

fDate

27-28 Oct. 2014

Firstpage

1

Lastpage

4

Abstract

Modern MEMS gyros are used in many different applications, but still there is an area that is uncovered - highly dynamic objects. It requires shock resistance up to 65000 g and ability to measure angular velocities up to 10000 °/s. Traditional vibrational micro rate gyros are not able to satisfy these requirements due to elastic suspensions and proof masses used in their design. That is why a solid-state gyro (SSG) should be constructed. Such devices consist of only a single crystal and accompanying electronics. This paper provides a short introduction to the theoretical framework of surface acoustic wave (SAW) based SSGs and a brief description, analysis and comparison of existing design concepts. It discusses main advantages, problems, and prospects for further development of SAW-based SSGs.

Keywords

gyroscopes; surface acoustic wave sensors; SAW based SSG; highly dynamic objects; microrate gyroscopes; shock resistance; single crystal devices; surface acoustic wave solid state gyroscope; surface acoustic waves; Angular velocity; Delay lines; Gyroscopes; Oscillators; Sensors; Surface acoustic waves; FEM-modeling; microgyroscope; surface acoustic wave;

fLanguage

English

Publisher

ieee

Conference_Titel

NORCHIP, 2014

Conference_Location

Tampere

Type

conf

DOI

10.1109/NORCHIP.2014.7004702

Filename

7004702