Title :
Highly transpearent submicrometer-sclae amorphous silicon waveguide for backend optical interconnect
Author :
Takei, Ryohei ; Manako, Shoko ; Omoda, E. ; Mori, Marco ; Sakakibara, Y. ; Kamei, Toshihiro
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol, Tsukuba, Japan
Abstract :
We demonstrate a submicron-scale hydrogenated amorphous silicon (a-Si:H) waveguide with a propagation loss of 0.90±0.02 dB/cm because of the very low infrared optical absorption of our low defect a-Si:H film.
Keywords :
hydrogen; integrated optics; optical films; optical interconnections; optical losses; optical materials; optical waveguides; silicon; SiH; backend optical interconnect; infrared optical absorption; low defect a-Si:H film; propagation loss; submicron-scale hydrogenated amorphous silicon waveguide; transparent submicrometer-scale amorphous silicon waveguide; Amorphous silicon; Optical device fabrication; Optical films; Optical refraction; Optical waveguides; Propagation losses; hydrogenated amorphous silicon; on-chip optical interconnect; optical waveguide; silicon photonics;
Conference_Titel :
Optical Interconnects Conference, 2014 IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4799-2467-7
DOI :
10.1109/OIC.2014.6886116
