• DocumentCode
    1792515
  • Title

    Highly transpearent submicrometer-sclae amorphous silicon waveguide for backend optical interconnect

  • Author

    Takei, Ryohei ; Manako, Shoko ; Omoda, E. ; Mori, Marco ; Sakakibara, Y. ; Kamei, Toshihiro

  • Author_Institution
    Nat. Inst. of Adv. Ind. Sci. & Technol, Tsukuba, Japan
  • fYear
    2014
  • fDate
    4-7 May 2014
  • Firstpage
    135
  • Lastpage
    136
  • Abstract
    We demonstrate a submicron-scale hydrogenated amorphous silicon (a-Si:H) waveguide with a propagation loss of 0.90±0.02 dB/cm because of the very low infrared optical absorption of our low defect a-Si:H film.
  • Keywords
    hydrogen; integrated optics; optical films; optical interconnections; optical losses; optical materials; optical waveguides; silicon; SiH; backend optical interconnect; infrared optical absorption; low defect a-Si:H film; propagation loss; submicron-scale hydrogenated amorphous silicon waveguide; transparent submicrometer-scale amorphous silicon waveguide; Amorphous silicon; Optical device fabrication; Optical films; Optical refraction; Optical waveguides; Propagation losses; hydrogenated amorphous silicon; on-chip optical interconnect; optical waveguide; silicon photonics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Interconnects Conference, 2014 IEEE
  • Conference_Location
    San Diego, CA
  • Print_ISBN
    978-1-4799-2467-7
  • Type

    conf

  • DOI
    10.1109/OIC.2014.6886116
  • Filename
    6886116
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1792515