• DocumentCode
    1792542
  • Title

    3D integration applications for low temperature direct bond technology

  • Author

    Enquist, Paul

  • Author_Institution
    Ziptronix, Inc., Raleigh, NC, USA
  • fYear
    2014
  • fDate
    15-16 July 2014
  • Firstpage
    8
  • Lastpage
    8
  • Abstract
    This paper describes low temperature direct bond technology and applications enabled by this technology. This technology includes ZiBond® and DBI® hybrid bonding. Enabled applications include backside illuminated (BSI) image sensors; stacked BSI image sensors; DBI® hybrid bond image sensors; 3D memory; higher performance, lower cost RF front ends; and reduced thickness, lower cost die stacks with reduced stress.
  • Keywords
    cryogenic electronics; image sensors; integrated circuit bonding; three-dimensional integrated circuits; 3D integration applications; 3D memory; DBI hybrid bond image sensors; ZiBond-DBI hybrid bonding; backside illuminated image sensors; low temperature direct bond technology; lower cost RF front ends; lower cost die stacks; stacked BSI image sensors; Dielectrics; Image sensors; Metals; Radio frequency; Surface treatment; Temperature sensors; Three-dimensional displays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Low Temperature Bonding for 3D Integration (LTB-3D), 2014 4th IEEE International Workshop on
  • Conference_Location
    Tokyo
  • Print_ISBN
    978-1-4799-5260-1
  • Type

    conf

  • DOI
    10.1109/LTB-3D.2014.6886147
  • Filename
    6886147