• DocumentCode
    1793564
  • Title

    Adiabatically widened silicon microring resonators with improved tolerance to wafer-scale variations

  • Author

    Mikkelsen, Jared C. ; Sacher, Wesley D. ; Poon, Joyce K. S.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada
  • fYear
    2014
  • fDate
    9-13 March 2014
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    Silicon microrings with adiabatically widened bends are more tolerant to dimensional variations than standard designs. Improvements in the intra-die and wafer-scale variation of the resonance wavelength are demonstrated in the IMEC passives process.
  • Keywords
    elemental semiconductors; resonance; resonators; silicon; wafer-scale integration; whispering gallery modes; IMEC passives process; Si; adiabatically widened bends; adiabatically widened silicon microring resonators; dimensional variations; intradie variation; resonance wavelength; wafer-scale variation; wafer-scale variations; Couplers; Optical resonators; Optical waveguides; Photonics; Standards; Strips;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communications Conference and Exhibition (OFC), 2014
  • Conference_Location
    San Francisco, CA
  • Print_ISBN
    978-1-5575-2994-7
  • Type

    conf

  • DOI
    10.1364/OFC.2014.Th2A.12
  • Filename
    6886690
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1793564