Title :
Impact of fabrication non-uniformity on chip-scale silicon photonic integrated circuits
Author :
Chrostowski, L. ; Wang, Xiongfei ; Flueckiger, J. ; Wu, Yaowu ; Wang, Yannan ; Fard, S. Talebi
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of British Columbia, Vancouver, BC, Canada
Abstract :
This study of 371 identical resonators on a 16×9 mm chip fabricated by a silicon photonics foundry reveals a strong linear correlation between the physical distance between devices and the variability in their wavelength mismatch.
Keywords :
elemental semiconductors; integrated optics; optical fabrication; optical resonators; silicon; Si; chip-scale silicon photonic integrated circuits; fabrication nonuniformity; optical resonators; physical distance; wavelength mismatch variability; Couplers; Fabrication; Gratings; Indexes; Optical resonators; Optical waveguides;
Conference_Titel :
Optical Fiber Communications Conference and Exhibition (OFC), 2014
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-5575-2994-7
DOI :
10.1364/OFC.2014.Th1C.1
