Title :
Laser integration with CMOS assembly process for Si photonics
Author :
Tseng, Ricky ; O´Callaghan, James ; Eid, Feras ; Gleeson, Michael ; Rawlings, Brandon ; Kobrinsky, Mauro ; Ban, Ibrahim ; Nagle, Roger ; McFarlane, William ; Corbett, Brandon ; Chang, Peter
Author_Institution :
Components Res., Technol. Manuf. Group, Intel Ireland, Leixlip, Ireland
Abstract :
High performance laser is integrated on Si substrates with evanescently coupled polymer waveguides. The design allows 2μm misalignment, consistent with CMOS assembly. 4μm gap and 8dB loss were demonstrated with improvement paths to <;2dB loss.
Keywords :
CMOS integrated circuits; integrated optoelectronics; optical polymers; optical waveguides; semiconductor lasers; CMOS assembly process; Si; Si substrates; evanescently coupled polymer waveguides; gap; laser integration; loss; misalignment; Bonding; Couplings; Lasers; Optical losses; Optical waveguides; Polymers; Waveguide lasers;
Conference_Titel :
Optical Fiber Communications Conference and Exhibition (OFC), 2014
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-5575-2994-7
DOI :
10.1364/OFC.2014.Th2A.41
