DocumentCode
1793651
Title
Path to silicon photonics commercialization: 25 Gb/s platform development in a CMOS manufacturing foundry line
Author
Lim, Andy Eu-Jin ; Tsung-Yang Liow ; Junfeng Song ; Chao Li ; Qing Fang ; Xiaoguang Tu ; Ning Duan ; Kok Kiong Chen ; Tern, Roger Poh Cher ; Chuan Peng ; Bong Woong Mun ; Islam, Md Nurul ; Jae Soo Park ; Subbu, Chivukula ; Guo-Qiang Lo
Author_Institution
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
fYear
2014
fDate
9-13 March 2014
Firstpage
1
Lastpage
3
Abstract
Silicon photonics platform in a commercial 0.18 μm CMOS foundry line is described. Low-loss Si passives and high speed germanium photodetectors (>20GHz) with low dark current (~11nA) and high responsivity (1.06A/W) at 1550nm are presented.
Keywords
CMOS integrated circuits; integrated optoelectronics; photodetectors; CMOS manufacturing foundry line; bit rate 25 Gbit/s; high speed germanium photodetector; low loss passive element; platform development; silicon photonics commercialization path; size 0.18 mum; wavelength 1550 nm; CMOS integrated circuits; Dark current; Optical fibers; Silicon photonics;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communications Conference and Exhibition (OFC), 2014
Conference_Location
San Francisco, CA
Print_ISBN
978-1-5575-2994-7
Type
conf
DOI
10.1364/OFC.2014.Th2A.51
Filename
6886733
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