Two-axis scanning micro mirror device with thick film metallic glass Cu-Zr-Ti and Parylene-C

Author

Watanabe, Shigetaka ; Nakamitsu, Yutaka ; Junpei, Sakurai ; Mizojiri, Mizue ; Hata, Satoshi

Author_Institution

Dept. of Micro-Nano Sytem Eng., Nagoya Univ., Nagoya, Japan

fYear

2014

fDate

10-12 Nov. 2014

Firstpage

1

Lastpage

4

Abstract

In this paper, we proposed a new fabrication method of thick film structure which has rectangular cross-sectional shape. This fabrication method utilized a new sputtering jig consisting of substrate and spacer units. The surface level of spacer unit is lower than one of substrate unit. After thick film deposition, the spacer unit is removed. In comparison with conventional sputtering and lift off process, thickness uniformity of structure fabricated by this method is improved dramatically. Finally, we fabricated the two-axis scanning micro mirror device which has coil element on the thick film structure of Parylene-C/Cu-Zr-Ti thin film metallic glass. This device achieved the optical scan angles of horizontal 10 degrees and vertical 10 degrees.

Keywords

copper compounds; microfabrication; micromirrors; optical fabrication; optical films; optical glass; optical polymers; sputtering; titanium compounds; zirconium compounds; CuZrTi; Parylene-C; coil element; fabrication method; optical scan angles; spacer unit; sputtering; thick film deposition; thick film metallic glass; thick film structure; two-axis scanning micromirror device; Coils; Fabrication; Mirrors; Shape; Sputtering; Substrates; Thick films;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro-NanoMechatronics and Human Science (MHS), 2014 International Symposium on

Conference_Location

Nagoya

Print_ISBN

978-1-4799-6678-3

Type

conf

DOI

10.1109/MHS.2014.7006094

Filename

7006094