High-efficiency thermal-tunable microring resonators made of Cu-dielectric-Si hybrid plasmonic waveguides

Author

Shiyang Zhu ; Lo, G.Q. ; Kwong, D.L.

Author_Institution

Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore

fYear

2014

fDate

9-13 March 2014

Firstpage

1

Lastpage

3

Abstract

Thermally tunable microring resonators based on Cu-dielectric-Si hybrid plasmonic waveguide are fabricated on a SOI platform using standard CMOS technology, which have radius of 2.5-3 μm and Q-value of ~166. By placing the TiN heater above the Cu cap over a thin SiN layer, the thermo-optic (TO) devices offer high tuning efficiency of ~1.1 nm/mW and fast tuning speed of ~17.2 μs as compared with the conventional Si ring resonator based TO devices.

Keywords

CMOS integrated circuits; copper; elemental semiconductors; micromechanical resonators; optical tuning; optical waveguides; silicon; silicon compounds; silicon-on-insulator; thermo-optical devices; titanium compounds; Cu-dielectric-Si hybrid plasmonic waveguides; Q-value; SOI platform; Si; SiN; TiN-Cu; heater; high-efficiency thermal-tunable microring resonators; standard CMOS technology; thermo-optic devices; tuning efficiency; tuning speed; Heating; Optical ring resonators; Optical waveguides; Plasmons; Silicon; Tuning;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical Fiber Communications Conference and Exhibition (OFC), 2014

Conference_Location

San Francisco, CA

Print_ISBN

978-1-5575-2994-7

Type

conf

DOI

10.1364/OFC.2014.Tu3E.5

Filename

6886950