An ANN model of polymer based MEMS structures: A modal analysis approach

Author

Katageri, Ajayakumar C. ; Sheeparamatti, B.G.

Author_Institution

Dept. of Electron. & Commun. Eng., Basaveshwar Eng. Coll., Bagalkot, India

fYear

2014

fDate

9-9 Oct. 2014

Firstpage

112

Lastpage

117

Abstract

Use of polymer material in manufacturing of microstructures has been a trend in recent MEMS technology. One such trend is employed in this paper where in four different micro structures are designed and simulated using SU8 polymer material. All the architectures are simulated using COMSOL Multi physics to compute modal frequency. The simulation results are verified analytically using a standard mathematical equations. The simulated architectures are then modelled using neural network to compute the dimensions of a given architecture for a desired modal frequency. Also the simulation results, the analytical results and the ANN results are compared for the various architectures.

Keywords

electronic engineering computing; micromechanical devices; modal analysis; neural nets; polymers; ANN model; COMSOL Multiphysics; MEMS technology; SU8 polymer material; modal analysis approach; modal frequency; neural network model; polymer material; polymer-based MEMS structures; standard mathematical equations; Artificial neural networks; Computational modeling; Computer architecture; Mathematical model; Micromechanical devices; Polymers; Resonant frequency; COMSOL; Modal frequency; Multiphysics; Neural network; SU-8;

fLanguage

English

Publisher

ieee

Conference_Titel

Smart Structures and Systems (ICSSS), 2014 International Conference on

Conference_Location

Chennai

Print_ISBN

978-1-4799-6506-9

Type

conf

DOI

10.1109/ICSSS.2014.7006184

Filename

7006184