DocumentCode
1794096
Title
Design and simulation study of polymer coated micro filter for detection of airborne particles
Author
Aravind, T. ; Kumar, Sathiya Prabhu ; Frances Raj, G. Karman ; Kumar, K. Kranthi
Author_Institution
Dept. of Electron. & Commun. Eng., Saveetha Eng. Coll., Chennai, India
fYear
2014
fDate
9-9 Oct. 2014
Firstpage
134
Lastpage
137
Abstract
A novel mechanical airborne filter to check the concentration gradient of airborne particles is discussed in this article. The system proposed here is experimented to detect the airborne microbes and its concentration analysed with the Chemical based Chromatography test. The proposed system which uses Silicon derivative material for the design of filter frame and an polymer material is coated over it. The polymerized coating is carried out to avoid the rapid oxidation of frame work. The system is equipped with the Contraction chamber and also the vacuum chamber equipped with chemical solvents. The entire Computational modelling carried out with Comsol multiphysics tool.
Keywords
atmospheric measuring apparatus; atmospheric techniques; chromatography; micromechanical devices; microorganisms; oxidation; silicon; Comsol multiphysics tool; Si; airborne microbes; airborne particle concentration gradient; airborne particle detection; chemical based chromatography test; chemical solvents; computational modelling; contraction chamber; filter frame design; mechanical airborne filter; polymer coated microfilter; polymer material; polymerized coating; rapid oxidation; silicon derivative material; vacuum chamber; Atmospheric modeling; Finite element analysis; Micromechanical devices; Optical filters; Polymers; Silicon; Chromatography Analyses; Comsol Multiphysics; Meshing; Silicon Nitride; parylene;
fLanguage
English
Publisher
ieee
Conference_Titel
Smart Structures and Systems (ICSSS), 2014 International Conference on
Conference_Location
Chennai
Print_ISBN
978-1-4799-6506-9
Type
conf
DOI
10.1109/ICSSS.2014.7006189
Filename
7006189
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