LTCC/PZT differential pressure sensor utilizing ultrasonic wave resonator

Author

Dabrowski, Arkadiusz P. ; Golonka, Leszek J.

Author_Institution

Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland

fYear

2014

fDate

7-11 May 2014

Firstpage

395

Lastpage

401

Abstract

In the paper technology and properties of a differential pressure sensor utilizing ultrasonic waves are presented. The device consists of a LTCC (Low Temperature Co-fired Ceramics) membrane with PZT (Lead Zirconate Titanate) active layer with two interdigitated transducers (IDTs). The sensor is a completely ceramic structure equipped with two gas inlets, hence measurements of differential pressure up to 20 kPa is possible. The properties of the sensor are determined in resonator mode, where frequency shift is observed during pressure and temperature changes. The sensor exhibits sensitivity of about -400 Hz/kPa and a thermal drift of about -2000 Hz/°C. Electronic circuits: amplifier and frequency counter are described. The thermal drift is compensated using an integrated thick-film PTC (positive temperature coefficient) resistor and software correction.

Keywords

acoustic resonators; amplifiers; ceramics; compensation; counting circuits; interdigital transducers; lead compounds; membranes; pressure measurement; pressure sensors; thick film resistors; thick film sensors; ultrasonic transducers; IDT; LTCC-PZT differential pressure sensor; PZT; amplifier; differential pressure measurement; electronic circuit; frequency counter; gas inlet; integrated thick-film PTC resistor; interdigitated transducer; lead zirconate titanate active layer; low temperature cofired ceramics membrane; positive temperature coefficient; thermal drift compensation; ultrasonic wave resonator; Acoustics; Ceramics; Sensitivity; Temperature measurement; Temperature sensors; Ultrasonic variables measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Technology (ISSE), Proceedings of the 2014 37th International Spring Seminar on

Conference_Location

Dresden

Type

conf

DOI

10.1109/ISSE.2014.6887632

Filename

6887632