Recovery procedure and bias shift analysis of MEMS high overload accelerometer due to shock

MEMS (micro electromechanical systems) accelerometer is increasing applied in high overload circumstances. The recovery time and bias shift of accelerometer could significantly influence the calculation accuracy of navigation systems. Recovery procedure of MEMS high overload accelerometer due to high-g shock has been studied. It is a complicated strong nonlinear response procedure. Different shock conditions and accelerometer´s electro mechanical parameters could influence the recovering trajectory and recovery time. Variations due to shock which could cause bias shift are investigated. Electrical shock simulation test and HPB (Hopkinson pressure bar) shock experiments are performed to verify simulation analysis. The sensor generally demonstrates a bias shift within ±20mg after enduring 10,000g to 21,000g shock based on 20 specimens´ results.