• DocumentCode
    1795728
  • Title

    Monolithic integration of suspended membrane disk resonator on silicon-on-insulator

  • Author

    Zhenzhou Cheng ; Ke Xu ; Hon Ki Tsang

  • Author_Institution
    Dept. of Electron. Eng., Chinese Univ. of Hong Kong, Hong Kong, China
  • fYear
    2014
  • fDate
    6-10 July 2014
  • Firstpage
    266
  • Lastpage
    268
  • Abstract
    Freestanding waveguide coupled pedestal disk, suspended adiabatic taper and focusing subwavelength gratings were monolithic integrated on silicon-on-insulator. The quality factor of ~105 with ~7 dB extinction ratio was measured in near-infrared.
  • Keywords
    Q-factor; diffraction gratings; extinction coefficients; integrated optics; optical resonators; optical waveguides; silicon-on-insulator; Si; extinction ratio; focusing subwavelength gratings; freestanding waveguide coupled pedestal disk; monolithic integration; quality factor; silicon-on-insulator; suspended adiabatic taper; suspended membrane disk resonator; Couplings; Focusing; Optical resonators; Scanning electron microscopy; Silicon; Silicon-on-insulator; Wavelength measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fibre Technology, 2014 OptoElectronics and Communication Conference and Australian Conference on
  • Conference_Location
    Melbourne, VIC
  • Type

    conf

  • Filename
    6888072
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1795728