• DocumentCode
    1795971
  • Title

    Monolithic large-scale optical switches using silicon photonic MEMS

  • Author

    Wu, Ming C. ; Sangyoon Han ; Tae Joon Seok ; Quack, Niels

  • Author_Institution
    Univ. of California, Berkeley, Berkeley, CA, USA
  • fYear
    2014
  • fDate
    6-10 July 2014
  • Firstpage
    625
  • Lastpage
    626
  • Abstract
    We report on high-port-count (50×50) fast optical circuit switches with 2.5μs response time. The switch with 2,500 MEMS switching elements have been monolithically integrated on 9×9mm2 dies using silicon photonic MEMS process on 220nm silicon-on-insulators.
  • Keywords
    electro-optical switches; elemental semiconductors; integrated optics; integrated optoelectronics; micro-optomechanical devices; monolithic integrated circuits; silicon; silicon-on-insulator; MEMS switching elements; Si; high-port-count fast optical circuit switches; monolithic integration; monolithic large-scale optical switches; silicon photonic MEMS; silicon-on-insulators; size 220 nm; time 2.5 mus; Micromechanical devices; Optical losses; Optical resonators; Optical switches; Optical waveguides; Silicon photonics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fibre Technology, 2014 OptoElectronics and Communication Conference and Australian Conference on
  • Conference_Location
    Melbourne, VIC
  • Type

    conf

  • Filename
    6888208
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1795971