Title :
Monolithic large-scale optical switches using silicon photonic MEMS
Author :
Wu, Ming C. ; Sangyoon Han ; Tae Joon Seok ; Quack, Niels
Author_Institution :
Univ. of California, Berkeley, Berkeley, CA, USA
Abstract :
We report on high-port-count (50×50) fast optical circuit switches with 2.5μs response time. The switch with 2,500 MEMS switching elements have been monolithically integrated on 9×9mm2 dies using silicon photonic MEMS process on 220nm silicon-on-insulators.
Keywords :
electro-optical switches; elemental semiconductors; integrated optics; integrated optoelectronics; micro-optomechanical devices; monolithic integrated circuits; silicon; silicon-on-insulator; MEMS switching elements; Si; high-port-count fast optical circuit switches; monolithic integration; monolithic large-scale optical switches; silicon photonic MEMS; silicon-on-insulators; size 220 nm; time 2.5 mus; Micromechanical devices; Optical losses; Optical resonators; Optical switches; Optical waveguides; Silicon photonics;
Conference_Titel :
Optical Fibre Technology, 2014 OptoElectronics and Communication Conference and Australian Conference on
Conference_Location :
Melbourne, VIC
