Title :
Improvement of power integrity with thin film capacitors embedded in organic interposer
Author :
Yoshizawa, Masamitsu ; Oyamada, Seisei ; Hattori, Asobu ; Nakura, Toru ; Asada, Kunihiro
Author_Institution :
Noda Screen Co., Ltd., Komaki, Japan
Abstract :
In this paper, we demonstrate our STO thin film decoupling capacitor embedded in organic interposer is effective for reduction of resonant power supply noise of LSI. By comparison of Shmoo plots with on-chip MOS capacitor, significant contributions of STO capacitor to higher operable frequency and lower power supply voltage are shown.
Keywords :
large scale integration; thin film capacitors; LSI; Shmoo plots; on-chip MOS capacitor; organic interposer; power integrity; resonant power supply noise reduction; thin film capacitors; Capacitance; Capacitors; Large scale integration; MOS capacitors; Noise; Power supplies; System-on-chip; embedded capacitor; interposer; power integrity; power supply noise; thin film capacitor;
Conference_Titel :
CPMT Symposium Japan (ICSJ), 2014 IEEE
Conference_Location :
Kyoto
Print_ISBN :
978-1-4799-6194-8
DOI :
10.1109/ICSJ.2014.7009625
