Modal analysis of a structure used as a capacitive MEMS accelerometer sensor

Author

Abarca-Jimenez, G.S. ; Reyes-Barranca, M.A. ; Mendoza-Acevedo, S. ; Munguia-Cervantes, J.E. ; Aleman-Arce, M.A.

Author_Institution

Dept. of Electr. Eng., CINVESTAV IPN, Mexico City, Mexico

fYear

2014

fDate

Sept. 29 2014-Oct. 3 2014

Firstpage

1

Lastpage

4

Abstract

In this paper a modal analysis for a proposed capacitive MEMS accelerometer sensor that can be used as inclinometer, dynamic acceleration or vibration sensor, is shown. An analysis of the effect of frequency over the displacement of the movable electrode is made. Besides, it is shown that the natural frequencies and vibration modes depend on the application given to this capacitive sensor. Additionally, the structure here proposed can be manufactured using standard CMOS technology. This paper shows how the same capacitive structure can be used in a MEMS sensor no matter what type of application you will provide. A model of the accelerometer is presented. The simulations shown were obtained using COMSOL.

Keywords

CMOS integrated circuits; accelerometers; capacitive sensors; electrodes; microsensors; modal analysis; vibration measurement; COMSOL simulation; capacitive MEMS accelerometer sensor; dynamic acceleration sensor; inclinometer; modal analysis; movable electrode displacement; standard CMOS technology; vibration sensor; Acceleration; Accelerometers; Micromechanical devices; Modal analysis; Oscillators; Resonant frequency; Vibrations; CMOS; capacitive MEMS accelerometer; dynamic acceleration; inclinometer; modal analysis; vibration sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Engineering, Computing Science and Automatic Control (CCE), 2014 11th International Conference on

Conference_Location

Campeche

Print_ISBN

978-1-4799-6228-0

Type

conf

DOI

10.1109/ICEEE.2014.6978263

Filename

6978263