DocumentCode :
1798733
Title :
Simulations of consecutive diffusion process
Author :
Jiulong Chen ; Wenhua Zhu ; Eynard, Benoit ; Bricogne, Matthieu ; Troussier, Nadege
Author_Institution :
CIMS & Robot Center, Shanghai Univ., Shanghai, China
fYear :
2014
fDate :
7-9 July 2014
Firstpage :
605
Lastpage :
610
Abstract :
Process simulation based on virtual reality can comprehensively present the real process on the computer. It can play an important role in the development and manufacturing field of diffusion furnace. This paper researches the establishment of consecutive diffusion process and the key techniques of process simulation. In the process of creating process simulation, V code would be created to control motion of each part. A simulation that reflects on the real process could be acquired with this research. This process simulation not only shortens the development time of diffusion furnace, but also makes designer have a perspective to the defects of product in the design process. It promotes the effective of design, and reduces changes in later period of design.
Keywords :
furnaces; product design; production engineering computing; semiconductor device manufacture; virtual reality; V code; consecutive diffusion process simulation; diffusion furnace; virtual reality; Control systems; Data models; Diffusion processes; Furnaces; Object oriented modeling; Semiconductor process modeling; Solid modeling; V code; consecutive diffusion furnace; process simulation; virtual simulation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Audio, Language and Image Processing (ICALIP), 2014 International Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4799-3902-2
Type :
conf
DOI :
10.1109/ICALIP.2014.7009866
Filename :
7009866
Link To Document :
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