• DocumentCode
    1798733
  • Title

    Simulations of consecutive diffusion process

  • Author

    Jiulong Chen ; Wenhua Zhu ; Eynard, Benoit ; Bricogne, Matthieu ; Troussier, Nadege

  • Author_Institution
    CIMS & Robot Center, Shanghai Univ., Shanghai, China
  • fYear
    2014
  • fDate
    7-9 July 2014
  • Firstpage
    605
  • Lastpage
    610
  • Abstract
    Process simulation based on virtual reality can comprehensively present the real process on the computer. It can play an important role in the development and manufacturing field of diffusion furnace. This paper researches the establishment of consecutive diffusion process and the key techniques of process simulation. In the process of creating process simulation, V code would be created to control motion of each part. A simulation that reflects on the real process could be acquired with this research. This process simulation not only shortens the development time of diffusion furnace, but also makes designer have a perspective to the defects of product in the design process. It promotes the effective of design, and reduces changes in later period of design.
  • Keywords
    furnaces; product design; production engineering computing; semiconductor device manufacture; virtual reality; V code; consecutive diffusion process simulation; diffusion furnace; virtual reality; Control systems; Data models; Diffusion processes; Furnaces; Object oriented modeling; Semiconductor process modeling; Solid modeling; V code; consecutive diffusion furnace; process simulation; virtual simulation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Audio, Language and Image Processing (ICALIP), 2014 International Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    978-1-4799-3902-2
  • Type

    conf

  • DOI
    10.1109/ICALIP.2014.7009866
  • Filename
    7009866