DocumentCode
1799097
Title
Concept study on an electrodynamically driven and read-out torsional oscillator
Author
Heinisch, Martin ; Voglhuber-Brunnmaier, Thomas ; Reichel, Erwin K. ; Clara, Stefan ; Abdallah, Ali ; Jakoby, Bernhard
Author_Institution
Inst. for Microelectron. & Microsensors, Johannes Kepler Univ. Linz, Linz, Austria
fYear
2014
fDate
8-9 May 2014
Firstpage
1
Lastpage
5
Abstract
In this contribution a concept study for an electrody-namically driven and read-out torsional oscillator is presented. The fundamental mechanical and electrodynamical theory is explained in detail and measurements results obtained with first prototypes are discussed.
Keywords
electrodynamics; oscillators; electrodynamical theory; electrodynamically driven oscillator; fundamental mechanical theory; read-out torsional oscillator; Coils; Frequency measurement; Oscillators; Resonant frequency; Rotors; Springs; Voltage measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Systems Symposium (MESS), 2014
Conference_Location
Vienna
Type
conf
DOI
10.1109/MESS.2014.7010256
Filename
7010256
Link To Document