• DocumentCode
    1799097
  • Title

    Concept study on an electrodynamically driven and read-out torsional oscillator

  • Author

    Heinisch, Martin ; Voglhuber-Brunnmaier, Thomas ; Reichel, Erwin K. ; Clara, Stefan ; Abdallah, Ali ; Jakoby, Bernhard

  • Author_Institution
    Inst. for Microelectron. & Microsensors, Johannes Kepler Univ. Linz, Linz, Austria
  • fYear
    2014
  • fDate
    8-9 May 2014
  • Firstpage
    1
  • Lastpage
    5
  • Abstract
    In this contribution a concept study for an electrody-namically driven and read-out torsional oscillator is presented. The fundamental mechanical and electrodynamical theory is explained in detail and measurements results obtained with first prototypes are discussed.
  • Keywords
    electrodynamics; oscillators; electrodynamical theory; electrodynamically driven oscillator; fundamental mechanical theory; read-out torsional oscillator; Coils; Frequency measurement; Oscillators; Resonant frequency; Rotors; Springs; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Systems Symposium (MESS), 2014
  • Conference_Location
    Vienna
  • Type

    conf

  • DOI
    10.1109/MESS.2014.7010256
  • Filename
    7010256