Study of morphological characteristics of Si:H p-i-n structures deposited by plasma on plastic substrates

Author

Ospina, C. ; Kosarev, A.

Author_Institution

Nat. Inst. for Astrophys., Opt. & Electron. (INAOE), Puebla, Mexico

fYear

2014

fDate

Sept. 29 2014-Oct. 3 2014

Firstpage

1

Lastpage

6

Abstract

In this work we present a study of material substrates and fabrication process effect on morphological characteristics of Si:H films and related p-i-n structures. Measurements of spectral dependence of optical transmittance of plastic substrates in ultraviolet and visible range were performed. AFM measurements were conducted over area of 10 × 10 μm² to reveal defects and over area of 2 × 2 μm² to determine morphological characteristics of the substrates, substrates coated by Ti and top surface of device structures plastic+Ti+(Si:H p-i-n). Performance of the device structures was characterized by current density-voltage measurements in dark and under AM1.5 illumination. Teflon substrate demonstrated higher transmittance in the UV and visible range in comparison with those for PEN and Kapton. The results of the AFM measurements showed effect of Ti deposition and p-i-n fabrication on the surface morphology for the plastic substrates studied. Finally performance characteristics of the devices fabricated on PEN and Kapton substrates are compared.

Keywords

atomic force microscopy; elemental semiconductors; flexible electronics; hydrogen; plasma deposition; polymer films; semiconductor thin films; silicon; solar cells; substrates; surface morphology; ultraviolet spectra; visible spectra; AFM measurements; Kapton substrate; PEN substrate; Si:H; Teflon substrate; current density -voltage measurements; material substrates; optical transmittance; p-i-n solar cells; p-i-n structures; plasma deposition; plastic substrates; surface morphology; ultraviolet range; visible range; Fabrication; Morphology; PIN photodiodes; Plastics; Substrates; Surface morphology; Surface treatment; AFM characterization; flexible substrates; p-i-n; surface morphology;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Engineering, Computing Science and Automatic Control (CCE), 2014 11th International Conference on

Conference_Location

Campeche

Print_ISBN

978-1-4799-6228-0

Type

conf

DOI

10.1109/ICEEE.2014.6978308

Filename

6978308