DocumentCode

1800294

Title

Addressable Micromachined Jet Arrays

Author

Coe, David J. ; Allen, Mark G. ; Smith, Barton L. ; Glezer, Ari

Volume

2

fYear

1995

fDate

25-29 Jun 1995

Firstpage

329

Lastpage

332

Keywords

Actuators; Aluminum; Biomembranes; Electrodes; Fabrication; Orifices; Polyimides; Silicon; Sputter etching; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721813

Filename

721813