Title :
Effects of parametric variation of a MEMS based Bulk acoustic wave resonator
Author :
Kumar, Wahengbam Kanan ; Kumar, Abhijeet
Author_Institution :
ECE Dept., Maharishi Markandeshwar Univ., Ambala, India
Abstract :
A MEMS based Bulk acoustic wave resonator is designed using COMSOL Multiphysics. This paper provides a glimpse as to how the series resonance of a BAW resonator varies with the dimension of a piezoelectric material. Variation of material thickness and the material of the piezoelectric ceramic layer are the prime motivations to deduce the resonant frequencies and compare it to the corresponding theoretical value. Eigen frequency analysis, frequency domain analysis and absolute value of admittance vs. frequency plots are computed to determine the series resonance and surface deformation of the resonator.
Keywords :
acoustic resonators; bulk acoustic wave devices; eigenvalues and eigenfunctions; frequency-domain analysis; micromechanical resonators; piezoceramics; BAW resonator; COMSOL Multiphysics; MEMS based bulk acoustic wave resonator; eigen frequency analysis; frequency domain analysis; material thickness; piezoelectric ceramic layer; piezoelectric material; resonant frequencies; series resonance; surface deformation; Admittance; Clocks; Electrodes; Lead; Resonant frequency; Silicon; Titanium compounds; Bulk acoustic wave; COMSOL Multiphysics; Eigen frequency analysis; frequency domain analysis; piezolectric material; series resonance;
Conference_Titel :
Computer Communication and Informatics (ICCCI), 2015 International Conference on
Conference_Location :
Coimbatore
Print_ISBN :
978-1-4799-6804-6
DOI :
10.1109/ICCCI.2015.7218131
