Investigation and Progress of Micro-Spectrometer´s Light Splitting System

It becomes possible to micro spectrometers with the development of micromachining techniques such as MEMS (micro electro mechanical systems). According to different dispersive elements used by micro spectrometers, the paper mainly illuminates the principle and fabrication technology of typical micro spectrometers whose dispersive elements adopt silicon micro grating, filter and Febry-Perot resonant cavity. The paper briefly summarizes the advantages, disadvantages and application of the micro spectrometers. In addition, it shows the interrelated parameter indexes of these micro spectrometers. Many potential applications where needing poor resolving power of wavelength are predicted. The development tendency of micro spectrometers is also presented.