DocumentCode :
1800655
Title :
Large area full fill factor microlens arrays
Author :
McCormick, M. ; Davies, N. ; Cartwright, P.
Author_Institution :
Dept. of Electron. & Electr. Eng., De Montfort Univ., Leicester, UK
fYear :
1996
fDate :
35122
Firstpage :
42644
Lastpage :
42646
Abstract :
Production of microlens arrays using the resist reflow technique has been extensively reported. These arrays have fill factors approaching 75% and in optical imaging systems the unlensed light introduces noise. N.T. Gordon et al. reported a sophisticated technique able to create full fill lens arrays. Davies and McCormick using optical lithography, proposed an alternative, less expensive method for photosculpting such full fill factor arrays. Large area microlens arrays when used for imaging require good spherical aberration compensation. A technique capable of generating non spherical forms is presented
Keywords :
aberrations; compensation; lenses; optical noise; photolithography; large area full fill factor microlens arrays; non spherical forms; optical imaging systems; optical lithography; photosculpting; resist reflow technique; spherical aberration compensation; unlensed light;
fLanguage :
English
Publisher :
iet
Conference_Titel :
Microengineering Applications in Optoelectronics, IEE Colloquium on
Conference_Location :
London
Type :
conf
DOI :
10.1049/ic:19960245
Filename :
542844
Link To Document :
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