Title :
First results on the characterization of new semitransparent amorphous silicon sensors [position sensors]
Author :
Calderon, A. ; Virto, A.L. ; Luque, J.M.
Author_Institution :
Inst. de Fisica, Univ. de Cantabria, Santander, Spain
Abstract :
We present first results on the performance of a new generation of semitransparent amorphous silicon position detectors having very good properties such as a precision better than 5 μm, deflection angles smaller than 10 μrad and transmission in the visible higher than 70%. In addition the sensitive area is very large: 30×30 cm2.
Keywords :
amorphous semiconductors; elemental semiconductors; photodetectors; position measurement; silicon; 2D position detecting sensors; 30 cm; ALMY sensors; Si; deflection angle; large sensitive area size; multipoint alignment; semitransparent amorphous silicon sensors; visible region light transmission; Amorphous silicon; Character generation; Electrodes; Glass; Laser beams; Magnetic sensors; Optical sensors; Sensor phenomena and characterization; Strips; Zinc oxide;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 2004. IMTC 04. Proceedings of the 21st IEEE
Print_ISBN :
0-7803-8248-X
DOI :
10.1109/IMTC.2004.1351235
