Title :
Dynamics Of Polysilicon Parallel-plate Electrostatic Actuators
Author :
Chu, Patrick B. ; Nelson, Phyllis R. ; Tachiki, Mark L. ; Pister, Kristofer S J
Keywords :
Capacitors; Electromechanical systems; Electrostatic actuators; Electrostatic measurements; Fabrication; Grippers; Laser modes; Low voltage; Springs; Testing;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721820
