DocumentCode

1801270

Title

Dynamics Of Polysilicon Parallel-plate Electrostatic Actuators

Author

Chu, Patrick B. ; Nelson, Phyllis R. ; Tachiki, Mark L. ; Pister, Kristofer S J

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

356

Lastpage

359

Keywords

Capacitors; Electromechanical systems; Electrostatic actuators; Electrostatic measurements; Fabrication; Grippers; Laser modes; Low voltage; Springs; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721820

Filename

721820