Title :
Double Pass Metallization For Cmos Aluminum Actuators
Author :
Buhler, J. ; Funk, J. ; Steiner, F.-P. ; Sarro, P.M. ; Baltes, H.
Keywords :
Aluminum; CMOS process; Circuits; Electrostatic actuators; Etching; Fasteners; Finite element methods; Metallization; Mirrors; Stress;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721821
