DocumentCode

1801319

Title

An Application Of Mechanical Leverage To Microactuation

Author

Smegowski, J.J. ; Smith, C.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

364

Lastpage

367

Keywords

Actuators; Capacitors; Electrodes; Electrostatics; Fingers; Laboratories; Micromachining; Micromechanical devices; Transducers; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721822

Filename

721822