Title :
A Practical Microgripper By Fine Alignment, Eutectic Bonding And Sma Actuation
Author :
Lee, Abraham P. ; Ciarlo, Dino R. ; Krulevitch, Peter A. ; Lehew, Stacy ; Trevino, Jimmy ; Northrup, M. Allen
Keywords :
Assembly; Etching; Fabrication; Grippers; Sawing; Shape memory alloys; Silicon; Sputtering; Temperature; Wafer bonding;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721823
