DocumentCode
1801403
Title
A nano lead on a force sensing cantilever for bilateral manipulation of a single cell
Author
Shuzo, Masaki ; Arai, Hidekazu ; Kanzaki, Ryohei ; Shimoyama, Isao
Author_Institution
Dept. of Mechano Informatics, Tokyo Univ., Japan
Volume
2
fYear
2005
fDate
5-9 June 2005
Firstpage
1720
Abstract
During cell manipulation using a micro probe, an operator was not able to realize the force acting on a cell until now. Using the MEMS technique, a probe combining a micro electrode and a force sensor is able to be fabricated. The depth type probe will help the operator insert the probe into the cell. In this paper, the fabrication method and the result of bilateral manipulation was shown.
Keywords
biological techniques; cellular biophysics; force sensors; microelectrodes; microsensors; nanotechnology; MEMS; bilateral manipulation; force sensing cantilever; force sensor; microelectrode; microprobe; nano lead; piezo-resistive cantilever; single cell; Atomic force microscopy; Electrodes; Etching; Fabrication; Force measurement; Force sensors; Gold; Hafnium; Probes; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN
0-7803-8994-8
Type
conf
DOI
10.1109/SENSOR.2005.1497423
Filename
1497423
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