Title :
Object Positioning Using A Surface Micromachined Distributed System
Author :
Goosen, J.F.L. ; Wolffenbuttel, R.F.
Keywords :
Capacitors; Electronic circuits; Electrostatic actuators; Fasteners; Force sensors; Geometry; Instruments; Laboratories; Transducers; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721830
