Title :
A new electrical recording neural probe integrated with chemical stimulation
Author :
Koo, Kyo-in ; Chung, Hum ; Yu, Youngsuk ; Seo, Jongmo ; Park, Jeahong ; Lim, Jung-Min ; Paik, Seung-Joon ; Lee, Ahra ; Park, Sungil ; Choi, HyunMin ; Jeong, Myoung-Jun ; Dong-Il Cho
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., South Korea
Abstract :
This paper presents an integrated neural probe that can be used as a neural signal recorder as well as a chemical stimulator. The single unit integrated probe features in-plane shanks with buried microchannels and low impedance microelectrodes. The fabricated neural probe has three 3 mm-long shanks with a 10 μm-diameter microchannel and six 30 μm × 30 μm square gold microelectrodes per shank. The measured impedance magnitude and the phase shift of the microelectrodes are 23.1 kΩ/900 μm2 and 52.9° at 1 kHz, respectively.
Keywords :
biomedical electronics; biomedical engineering; microelectrodes; neurophysiology; 1 kHz; 10 micron; 3 mm; 30 micron; 900 micron; chemical stimulation; chemical stimulator; electrical recording neural probe; gold microelectrodes; impedance magnitude; impedance microelectrodes; in-plane shanks; integrated neural probe; microchannels; microelectrodes phase shift; neural signal recorder; Anisotropic magnetoresistance; Chemicals; Dry etching; Fabrication; Impedance measurement; Microchannel; Microelectrodes; Probes; Silicon; Substrates;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1497445
