Title :
An Integrated Pressure-flow Sensor For Correlation Measurements In Turbulent Gas Flows
Author :
Kalvesten, E. ; Vieider, Christian ; Lofdahl, Lennart ; Stemme, Göran
Keywords :
Area measurement; Fluid flow measurement; Gas detectors; Pressure measurement; Semiconductor device measurement; Sensor phenomena and characterization; Silicon; Stress measurement; Temperature sensors; Thermal sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721838
