DocumentCode :
1802343
Title :
The effects of electronic beam radiation on tin dioxide gas sensors
Author :
Wu, Minghong ; Jiao, Zheng ; Li, Zhen ; Liu, Tiebing ; Wang, Deqing ; Xiang Geng
Author_Institution :
Shanghai Appl. Radiat. Inst., Shanghai Univ., China
Volume :
2
fYear :
2005
fDate :
5-9 June 2005
Firstpage :
1896
Abstract :
In this paper the effects of electron beam irradiation on the gas sensing performance of SnO2 thin films toward NO2 are studied. The SnO2 thin films were prepared by ultrasonic spray pyrolysis. Results show the sensitivity increased after electron beam irradiation.
Keywords :
electron beam effects; gas sensors; pyrolysis; thin films; tin compounds; ultrasonic applications; SnO2; SnO2 thin film; electron beam irradiation; electronic beam radiation; gas sensing performance; tin dioxide gas sensor; ultrasonic spray pyrolysis; Electron beams; Gas detectors; Optical films; Organic light emitting diodes; Semiconductor materials; Spraying; Surface resistance; Thin film sensors; Tin; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
Type :
conf
DOI :
10.1109/SENSOR.2005.1497467
Filename :
1497467
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1802343
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