Toxic gas response of (In,Sn)O2/Pt nanowire sensors

Thin film gas sensors based on tin oxide are fabricated and its characteristics are examined. Target gases are dimethyl methylphosphonate(C₃H₉O₃P, DMMP) as a simulant gas for nerve gas GA (Tabun) and acetonitrile (CH₃CN) as a simulant gas for blood gas. Sensing materials are Pt/SnO₂, where Pt layer (30 Å) is deposited on tin oxide film grown on alumina substrate, (Sn,In)O₂/Pt and SnO₂/Pt, where (Sn,In)O₂ and tin oxide films are deposited on Pt layer (30 Å) grown on alumina substrate, respectively. In the latter two sample have a nano-wire structure grown over thin film. The thickness of nano-wire is ∼ 60 nm. Nano-wire sensors grown on thin film show high sensitivity and stability to DMMP and CH₃CN. We display the results compared that of nano-wire with ordinary tin oxide sample.