DocumentCode :
1802637
Title :
Multiwall carbon nanotubes grown on a four-probe patterned catalyst layer for chemical sensor applications
Author :
Jeong-Soo Lee ; Chandrashekar, A. ; Parikh, K. ; Cattanach, K. ; Manohar, S.K. ; Lee, Jeong-Soo ; Overzet, L.
Author_Institution :
Dept. of Electr. Eng., Texas Univ., Dallas, TX, USA
Volume :
2
fYear :
2005
fDate :
5-9 June 2005
Firstpage :
1943
Abstract :
The fabrication and the application of aligned multi-wall carbon nanotubes (MWNTs) grown on a four-probe patterned catalyst layer for the detection of chemical vapors are reported. The temperature resistance results show that the aligned MWNTs are semiconducting and follow the 3-dimensional hopping conduction mechanism. Effects of oxygen plasma on the characteristics of the MWNTs are also investigated. The four-probe MWNTs devices show resistance changes with exposure to gas vapors and that correlate with solvent polarity parameters. Those results suggest that our four-probe MWNTs devices are promising for chemical sensor applications.
Keywords :
carbon nanotubes; gas sensors; photoresists; MWNT; PECVD; chemical sensor; chemical vapors detection; four-probe patterned catalyst layer; gas vapors; hopping conduction mechanism; multiwall carbon nanotubes; oxygen plasma; solvent polarity parameters; temperature resistance; Carbon nanotubes; Chemical sensors; Fabrication; Plasma applications; Plasma chemistry; Plasma devices; Plasma properties; Plasma temperature; Semiconductivity; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
Type :
conf
DOI :
10.1109/SENSOR.2005.1497479
Filename :
1497479
Link To Document :
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