Title :
A Silicon Micromachined Floating-element Shear-stress Sensor With Optical Position Sensing By Photodiodes
Author :
Padmanabhan, A. ; Goldberg, H.D. ; Breuer, K.S. ; Schmidt, M.A.
Keywords :
Diodes; Fluid flow measurement; Length measurement; Optical sensors; Photoconductivity; Photodiodes; Silicon; Spatial resolution; Stress measurement; Time measurement;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721840
