DocumentCode
1802779
Title
A Silicon Micromachined Floating-element Shear-stress Sensor With Optical Position Sensing By Photodiodes
Author
Padmanabhan, A. ; Goldberg, H.D. ; Breuer, K.S. ; Schmidt, M.A.
Volume
2
fYear
1995
fDate
25-29 June 1995
Firstpage
436
Lastpage
439
Keywords
Diodes; Fluid flow measurement; Length measurement; Optical sensors; Photoconductivity; Photodiodes; Silicon; Spatial resolution; Stress measurement; Time measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721840
Filename
721840
Link To Document